In traditional surface metrology Measurements tend to be of profiles (z=z(x)) ra

Question

In traditional surface metrology Measurements tend to be of profiles (z=z(x)) rather than surfaces (areal, z=z(x, y)) Characterizations are largely by height parameter statistics that ignore the spatial information Analyses include large band widths by filtering (roughness and waviness) which lacks scale specificity Multi-scale analyses are widely used AII of the above a, b & c only Traditional filtering of profile and areal measurements is intended to Separate form, waviness and roughness Separate periodicity from roughness Eliminates all outliers effectively Provide a hybrid, multiscale approach AII of the above f a, b & c only Changing the filter wavelengths for a measured profile Can change the value of height parameters by no more than 10% Can change the value of height parameters by no more than 20% Can change the value of height parameters by no more than 30% Can change the value of height parameters by no more than 40% Can change the value of height parameters by more than 40% Does not change the value of the height parameters Traditional specifications of roughness on a print Require all the filtering information to be indicated Require all the process information Emphasize arithmetic average roughness, Ra Is in a square box as specified by NIST All of the above a, b & c only

Explanation / Answer

5. a,b,c only

6. Seperate form, waviness and roughness

7 can change the value of surface parameters not more than 10 percent

8. Emphasize arithmetic average roughness.

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