To measure the compressive stress in a 1.5 ?m thick layer of polysilicon, you de

Question

To measure the compressive stress in a 1.5 ?m thick layer of polysilicon, you design a test structure composed of clamped-clamped beams of various lengths as shown below. After releasing the device and looking under the microscope, it is clear that only the beam with a length of 120 ?m has buckled. Provide an upper and lower bound on the stress in this layer.

To measure the compressive stress in a 1.5 m thick layer of polysilicon, you design a test structure composed of clamped-clamped beams of various lengths as shown below. After releasing the device and looking under the microscope, it is clear that only the beam with a length of 120 um has buckled. Provide an upper and lower bound on the stress in this layer L=60 8Oum L= 100m L=120 m

Explanation / Answer

compressive stress in apolysilicon =Ldg

here L=60+80+100+120=360 m=360*10-6m,density of polysilicon d=2.3*103kg/m3,g=10 m/s2

  compressive stress in apolysilicon =360*10-6*2.3*103*10=828*10-2=8.28pascal

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