Assume that the circuit shown in Figure 4.9 is a matched system running at 13.56
ID: 1715829 • Letter: A
Question
Assume that the circuit shown in Figure 4.9 is a matched system running at 13.56 MHz. Now, assume that the process conditions in the chamber have changed
from 40 WÐ - 65o to a new impedance of 30 WÐ - 55o . What new values of L
and C in the matching unit will be needed if the new load impedance is to be matched to the characteristic impedance of the transmission line?
Cable Rgen = 500-500 Zi-4002-652 RF Generator Matching Unit Figure 4.9. Schematic of a power delivery system with "L" matching unit.Explanation / Answer
Rf generator RL=30ohms(load)+50ohms(cable)=80
Q = \[(RL/Rg) – 1\]
Q = \[80/50) – 1\] = \[(1.6) – 1\] = 4 = .774
XL = QRg = .774 *(50) = 38.72
L = XL/2f
L = 38.72/\[2(3.14)(13.56 x 106)\]
L = 45.4 microH
XC = RL/Q
XC = 80/.774 = 103.35
C = 1/2fXC
C = 1/\[2(3.14)(13.56 x 106)(103.35)\]
C = .11135nF
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