Question 10 Elevated temperature testing is a common way to assess the impact of

Question

Question 10

Elevated temperature testing is a common way to assess the impact of some failure mechanisms in semiconductor devices.   However, it only applies to processes where the root-cause failure is caused by:

Differential expansion

Change in carrier mobility

Quantum mechanical tunneling

High voltage breakdown

Bond breaking

Built-in stress within LPCVD layers

Differential expansion

Change in carrier mobility

Quantum mechanical tunneling

High voltage breakdown

Bond breaking

Built-in stress within LPCVD layers

Explanation / Answer

Elevated temperature testing is used to check the failure mechanism of different materials as well as equipments. In case of semiconductors too test at elevated temperatures are carried out but for the test to be effective the root cause of failure should be change in carrier mobility since change in carrier mobility causes change in temperature. That is as the carrier mobility increases it causes an increase in temperature and this may lead to failure of the semiconducting device and testing at elevated temperatures can identify the occurrence of these failures. Like semiconductor resistivity could be calculated at elevated temperatures because semiconductor resistivity is temperature dependent and follows the equation R=r(1+at)

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