Which of the following is/are TRUE about lithography? a. It is a technique for s

Question

Which of the following is/are TRUE about lithography? a. It is a technique for surface polishing wafers b. It is a widely used technique for making single crystals of semiconductors c. It is a surface polishing operation d. It is a technique of creating geometrical patterns in the form of various layers/steps to make 5. up electronic devices It is a technique of contour grinding to round the wafer rim It is a machining technique in which a beam of gallium (Ga) ions from a liquid metal ion source is e. f. accelerated, filtered, and focused with electromagnetic lenses What are the TWO basic categories of approaches used in nanofabrication? Provide TWO examples in each of the categories. Draw a brief sketch of one of them. 6.

Explanation / Answer

STATEMENTS TRUE ABOUT LITHOGRAPHY

d. It is a techinque of creating geometricla patterns in the form of various layers/steps to make up electronic devices.

e. It is a technique of contor grinding to round the wafer rim.

f. It is a machining technique in which beam of gallium ions from a liquid metal ion source is accelerated, filtered and focussed with electro magnetic lenses

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